Alicat BASIS Series Compact Controllers for OEM Applications

Performance

Available ranges: 0-100 sccm, 0-1000 sccm, and 0-20 slpm (see Part Numbers)

Operating range (Turndown ratio): 200:1 (1, 20 and 50 slpm) or 100:1 (100 sccm)

Calibration accuracy, NIST-traceable: +/- (1.5% of the reading + 0.5% of the full-scale range)

Repeatability: 0.5% of the full-scale range

Typical control response time constant: 100 ms (adjustable with PD tuning)

Warm-up time: 70 ms to full accuracy spec

Operating Conditions

Compatible gases: Air, Ar, CO2, N2, O2, N2O (selectable over serial connection); He or H2 calibration (for use with one gas only) also available at time of order

Operating temperature: 0°C to +50°C

Max internal pressure (static): 145 psig (160 psia) for 0-100 and 0-1000 sccm ranges; 60 psig (75 psia) for 0-20 slpm ranges

Proof pressure: 175 psig (190 psia)

STP: 25°C & 1 atm (14.696 psia)