Alicat MCQ Series High Pressure Gas Flow Controllers

Performance

Available ranges: max 0-3000 slpm, min 0-10 sccm (see Part Numbers tab for stock ranges)

Steady state control range: 0.5% – 100% of full scale.

Standard accuracy calibration, NIST-traceable: +/- (0.6% of the reading on most products)

Optional high-accuracy calibration, NIST-traceable: +/- (0.5% of the reading on most products)

Repeatability: +/- 0.1% of full scale on most products

Typical control response time constant: 50-100 ms (as low as 25 ms with PID tuning)

No warm-up time required

Operating Conditions

Compatible gases: 98 pre-loaded selectable gas calibrations; additional mixtures definable with COMPOSER

Operating temperature: -10°C to +60°C

Max internal pressure (static): 320 psia

Proof pressure: 400 psia

STP/NTP: user-selectable (defaults to 25°C & 1 atm STP/0°C & 1 atm NTP)