Alicat MCV Series Vacuum Gas Mass Flow Controllers

Performance

Available ranges: max 0-20 slpm, min 0-0.5 sccm/0-500 sμlm

Steady state control range: 0.01% – 100% of full scale.

Standard accuracy calibration, NIST-traceable: +/- (0.6% of the reading on most products)

Optional high-accuracy calibration, NIST-traceable: +/- (0.5% of the reading on most products)

Repeatability: +/- 0.1% of reading + 0.02% of full scale

Typical control response time constant: 50-100 ms (as low as 25 ms with PID tuning)

Pneumatic valve leak integrity (MCV only): 1 x 10-9 atm scc/sec Helium max

No warm-up time required

Operating Conditions

Compatible gases: 98 (MCE/MCV) or 130 (MCES/MCVS) pre-loaded selectable gas calibrations; additional mixtures definable with COMPOSER

Operating temperature: -10°C to +60°C

Max internal pressure (static): 145 psig (160 psia)

Proof pressure: 175 psig (190 psia)

STP/NTP: user-selectable (defaults to 25°C & 1 atm STP/0°C & 1 atm NTP)