KYOWA DMo-WA Series for Wafer and Disc-Shaped Samples

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KYOWA DMo-WA Series for Wafer and Disc-Shaped Samples

DMo-WA Series, Designed for wafer and disc-shaped samples

 

The three models of the DMo-WA series are specially designed contact angle meters for measurements of disk-shaped substrates such as silicon wafers with a diameter of up to 300mm.
All models feature a 305mm diameter 360º rotation table and a computer-controlled dispenser which allow for automatic measurements of contact angle, advancing and receding angles, as well as analysis of surface free energy of solids.
Optional, a tilting stage for the measurement of roll-off angles is also available.

 

Each model combines the following features

  • Fast image capturing system with standard 400 fps at 640x480 resolution USB3.0 CMOS camera, max. 2700fps at 640x64 resolution
  • Automatic single dispenser system
  • Diameter 335mm 360º rotation sample stage with a maximum load capacity of 0.4kgs
  • Stage travel distance: x-axis: 150mm, y-axis: fixed, z-axis: fixed
  • Focusing aid with displayed index graph and value and brightness adjustment to achieve perfect focus
  • Movie converter to convert data images to MPEG-1 or AVI movie format
  • Determination of contact angles, droplet volume, residual droplet volume, sessile drop volume, height, and radius of the sessile drop
  • Measured results are displayed in a spreadsheet for easy reference and comparison, and saved in csv format for easy export to and manipulation in MS Excel
  • User-specified analysis report function, providing measurement results and parameters
  • Droplet calibration standard for standard view, bearing one full circle for calibration and three droplet silhouettes of 5º, 60º, and 108º for periodic inspection of measurement accuracy

 

 

The following table describes the differences between the measuring process of each model

 

The following table describes the differences between the measuring process of each model

DMo
model

Positioning of first measurement

Generation of droplet

Deposition of droplet (control / recognition)

Analysis of droplet

Positioning of next measurement

Full-scale continuous measurements

502WA


by rotary knob

▲ / ●

702WA


by command button

● / ●

902WA

● / ●

  • ▲ manual ● automatic

 

Features

  • Automatic recognition of drop deposition
  • Live image display and droplet volume monitoring
  • Movie converter
  • Automatic dispenser with a set of 5 glass syringes and 5 SUS needles for precise adjustment of droplet volume and quick refilling and replacement of liquid samples
  • Fine adjustable stage in x- and z-axis for exact positioning and gentle deposition of droplets without distortion
  • Adjustable level of the body and stage
  • Droplet calibration standard for standard view, bearing one full circle for calibration and three droplet silhouettes of 5º, 60º, and 108º for periodic inspection of measurement accuracy

 

Options

  • Tilting stage for measurements of roll-off angles, incl. FAMAS software add-in [Sliding method] (except 902)
  • Add-on module [Dynamic sliding method] to measure roll-off speed and roll-off acceleration. Only in combination with the tilting stage package (except 902)
  • Multi-manual dispenser holder
  • Multi-automatic dispenser system
  • Large capacity pump dispenser, incl. a 50μl liquid container
  • Surface free energy kit
  • Pendant drop kit (for standard & wide view)
  • Droplet calibration standard (for wide 1 view)
  • Pendant drop kit (for standard & wide view)
  • Kit for captive-bubble-measurements
  • Pendant drop calibration standard (for standard view)
  • Pendant drop calibration standard (for wide 1 and wide 2 view)

 

Applications

  • Surface cleanliness and homogeneity after cleaning processes (typically for removal of organic contaminations)
  • Surface properties such as wettability and adhesion of modified surfaces and thin film coatings
  • Wetting and dewetting properties in immersion lithography processes using the sliding method with external tilting stage and/or using the extension/contraction method

Specifications

 

DMo-902WA

DMo-702WA

DMo-502WA

Camera system





 

USB3.0 CMOS camera with:
400fps at 640x480 pixels
500fps at 640x400 pixels
1000fps at 640x200 pixels
2700fps at 640x64 pixels

 

Optical system


 

focus: manual focus with 3-step manual zoom
field of view: 6.1x4.7mm, 11.1x8.2mm, 15.8x11.8mm ±6%

 

Measuring methods


 

contact angle: sessile drop (static & dynamic), advancing/receding, tilting1)
surface/interfacial tension: pendant drop (static & dynamic)

 

Analysis methods




 

contact angle: θ/2, tangent, curve fitting (ellipse, circle)
surface/interfacial tension: Young-Laplace, ds/de
surface free energy of solids: OWRK, Owens-Wendt, Kaelble-Uy, Kitazaki-Hata, Wu, acid-base, Zisman

 

Measuring range


 

contact angle: 0 to 180°
surface/interfacial tension: 0 to 2000mN/m

 

Resolution


 

contact angle: 0.01°
surface/interfacial tension: 0.01mN/m

 

Accuracy2)


 

contact angle: 0.2°
surface/interfacial tension: 0.2mN/m

 

Maximum sample surface area and height (Dia.xH)

 

max. 300x35mm


 

Maximum sample weight

 

400g

 

Sample stage operation:
X-axis
Y-axis
Z-axis
Rotation axis

 


150mm (aut.)
---
---
360° (aut.)

 


150mm (aut.)
---
---
360° (man.)

 


150mm (man.)
---
---
360° (man.)

 

Dispenser operation:
Z-axis
Droplet deposition
Droplet generation
Dispensing resolution

 


35mm
automatic
automatic
0.1μl

 


35mm
automatic
automatic
0.1μl

 


35mm
manual
automatic
0.1μl

 

Measuring temperature

 

ambient

 

Dimensions (WxDxH) of:
Main instrument
Control box

 


375x684x432mm
290x240x100mm

 


375x684x432mm
260x200x70mm

 

Approximately weight of:
Main instrument
Control box

 


12.5kg
4.3kg

 


11.0kg
4.3kg

 


10.0kg
1.6kg

 

Electric power:
Voltage
Frequency
Power consumption

 


AC100-240V
50/60 Hz
115W 120VA

 


AC100-240V
50/60 Hz
25W 48VA

 

Operating environment
 

temperature: +10 to +35℃, humidity: 30-80%RH (non-condensing)
positioned away from sources of electrical noise and vibration